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Semiconductor

Parameter has applied its precise control capabilities to the semiconductor industry since the early 1990s. That has recently expanded with a major electronics company in New England.

The pictured unit will be applied to a photo lithography application in the company’s production line. Parameter’s 250-400 CFM conditioning unit (9324) was used for this application.

The semiconductor industry is one of the industries Parameter serves where our systems are used in production instead of testing. For this application, coating thickness must be extremely repeatable and the thickness will vary if moisture content in the spin process is not the same.

The critical factor for semiconductor applications is Parameter’s precise control capabilities. Many of the systems within semiconductor applications require ± 0.05º C air control and ±0.5% RH control to a 3 sigma.